| 摘要 |
PROBLEM TO BE SOLVED: To prevent disconnections and short-circuits in a power feeding area for heating a catalyst when activating a treatment gas by means of the heated catalyst, and then conducting treatment with respect to a substrate by using an active species formed from the treatment gas. SOLUTION: A plarity of rod-like ceramic heaters 31 are disposed and secured to a top plate of a treatment vessel 1 in an island configuration so as to be opposed to a wafer W, and a metal catalyst layer 44 is provided at the lower end of each ceramic heater 31 so as to face gas discharge holes 13 in a gas diffuser plate 11, and the metal catalyst layer 44 is indirectly heated by the ceramic heaters 31 (resistance heating wires 42), thereby activating the treatment gas. COPYRIGHT: (C)2011,JPO&INPIT
|
