发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 The present invention relates to a semiconductor device and a method for manufacturing the same. According to the present invention, a method of manufacturing a semiconductor device includes: forming a recess on a semiconductor substrate; forming a first gate electrode material and a hard mask layer on an entire surface including the recess; etching the hard mask layer and the first gate electrode material to form the first gate electrode pattern on a lower portion of inside of the recess; forming a second gate electrode material on an entire surface including the recess; and etching the second gate electrode material and separating the second gate electrode material.
申请公布号 US2011180868(A1) 申请公布日期 2011.07.28
申请号 US20100848045 申请日期 2010.07.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 JANG KYOUNG CHUL
分类号 H01L29/78;H01L21/28 主分类号 H01L29/78
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