| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly-accurate physical quantity sensor including a vibrating reed which vibrates torsionally. <P>SOLUTION: The vibrating reed 100 includes: a first driving beam 11 and a second driving beam 12 that vibrate in torsional vibration modes and are elongated mutually side by side in the X-axis direction; support parts 21, 22 that couple each one end and each other end of the first driving beam 11 and the second driving beam 12; and a first detection arm 31 and a second detection arm 32 elongated respectively from the first driving beam 11 and the second driving beam 12 in the Y-axis direction orthogonal to the X-axis direction. In a drive mode, the first driving beam 11 and the second driving beam 12 torsionally vibrate in opposite directions to each other, and the first detection arm 31 and the second detection arm 32 vibrate in the Z-axis direction, and the first detection arm 31 and the second detection arm 32 vibrate in the same direction mutually. In a detection mode, when angular velocity is applied around the Y-axis direction, the first detection arm 31 and the second detection arm 32 vibrate in the X-axis direction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
