| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding device in which grinding chips are not stuck to a wheel mount. SOLUTION: The grinding device includes a chuck table for holding a work, a grinding means for supporting rotatably a grinding wheel having a grindstone for grinding the work held by the chuck table arranged in an annular form, and a grinding water supply means for supplying grinding water to the work and the grindstone. The grinding means includes the wheel mount to which the grinding wheel fixed to an end of a rotated and driven spindle is detachably attached. An attaching surface of the wheel mount to which the grinding wheel is detachably attached is coated with DLC. COPYRIGHT: (C)2011,JPO&INPIT |
