发明名称 LIQUID DROPPING DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a liquid dropping device capable of reducing the variation of the dropping quantity when dropping a trace amount of a liquid. SOLUTION: The liquid dropping device is provided with: a plunger rod 3 reciprocally moved by power transferred from a driving source; a syringe 2 having a syringe space 2a into which the plunger rod 3 is inserted and constituted so as to supply the liquid into the syringe space 2a from a prescribed liquid source and to drop the supplied liquid by the reciprocal movement of the plunger rod 3; and a sealing member 4 for sealing a gap between the inner surface 2b of the syringe 2 and the side surface 3b of the plunger rod 3. The gap G between the inner surface 2b of the syringe 2 and the side surface 3b of the plunger rod 3 is set to 3μm to 10μm. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011143362(A) 申请公布日期 2011.07.28
申请号 JP20100006774 申请日期 2010.01.15
申请人 ULVAC JAPAN LTD 发明人 SHIBA TOMOSHI;MURATA MASAAKI;MIYATA TAKAHIRO;YAHAGI MITSURU
分类号 B05C5/00;B05D3/00;G02F1/13 主分类号 B05C5/00
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