发明名称 |
LIQUID DROPPING DEVICE AND METHOD OF MANUFACTURING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a liquid dropping device capable of reducing the variation of the dropping quantity when dropping a trace amount of a liquid. SOLUTION: The liquid dropping device is provided with: a plunger rod 3 reciprocally moved by power transferred from a driving source; a syringe 2 having a syringe space 2a into which the plunger rod 3 is inserted and constituted so as to supply the liquid into the syringe space 2a from a prescribed liquid source and to drop the supplied liquid by the reciprocal movement of the plunger rod 3; and a sealing member 4 for sealing a gap between the inner surface 2b of the syringe 2 and the side surface 3b of the plunger rod 3. The gap G between the inner surface 2b of the syringe 2 and the side surface 3b of the plunger rod 3 is set to 3μm to 10μm. COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2011143362(A) |
申请公布日期 |
2011.07.28 |
申请号 |
JP20100006774 |
申请日期 |
2010.01.15 |
申请人 |
ULVAC JAPAN LTD |
发明人 |
SHIBA TOMOSHI;MURATA MASAAKI;MIYATA TAKAHIRO;YAHAGI MITSURU |
分类号 |
B05C5/00;B05D3/00;G02F1/13 |
主分类号 |
B05C5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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