| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source capable of being heated to a desired temperature at low voltage and low power, and capable of obtaining stable high current density. <P>SOLUTION: The electron source is equipped with an insulating base, a support mounted on the base, an electron emission part, and a spacer which holds the electron emission part and electrically connects the electron emission part to the support. While the spacer is made of pyrolytic graphite, a metallized layer is formed on the surface of the spacer except for contact surfaces with the electron emission part and the support. The metallized layer is not formed on the contact surfaces cited above. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
