| 摘要 |
PROBLEM TO BE SOLVED: To provide a reflowing apparatus in which mist concentration of gas in a reflowing furnace is measured, and if the concentration becomes higher than a preset value, an alarm is generated and flux removal capability is enhanced. SOLUTION: Gas in the furnace is inhaled through a zone Z6 acting as a main heating part, and the inhaled gas is discharged in the furnace from a discharge part of a zone Z7 through a flux recovery unit 31 and a blower 32. A measured value of a dustmeter 23 by light scattering method is supplied to a controller 33. The controller 33 compares the measured value to a preset threshold value, and if the measured value becomes higher than the threshold value, generates an alarm using an alarm unit 35 and increases the number of revolution of a fan of the flux recovery unit 31 and/or the blower 32. COPYRIGHT: (C)2011,JPO&INPIT |
