| 摘要 |
PROBLEM TO BE SOLVED: To provide a method reducing power consumption at a stand-by attitude of a substrate conveying device. SOLUTION: The substrate conveying device includes: a hand part 14 for placing a conveyed article; a horizontal arm mechanism 30 connected to the hand part 14, including at least two rotation joints, expanded/contracted to move the hand part 14 in one direction and arranged to be opposed to the axial direction; and a lifting mechanism 20 constituted by at least two pairs of link mechanisms provided on a base member vertically moving the horizontal arm mechanism 30. At the stand-by position of the horizontal arm mechanism 30, the horizontal arm mechanism 30 is moved to the most-descending position and the horizontal arm mechanism is arranged in the lifting mechanism 20. COPYRIGHT: (C)2011,JPO&INPIT
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