发明名称 ELECTRICAL AND OPTICAL PROPERTIES OF SILICON SOLAR CELLS
摘要 The method for manufacturing a photovoltaic cell or a photovoltaic converter panel comprises depositing a layer of p-doped amorphous silicon using a gas mixture comprising silane, methane, hydrogen and trimethylboron in a ratio of 1:2:2:1.25. In particular, plasma-enhanced chemical vapor deposition is used for the deposition. The corresponding photovoltaic cells and photovoltaic converter panels are also described.
申请公布号 US2011180142(A1) 申请公布日期 2011.07.28
申请号 US200913059685 申请日期 2009.08.06
申请人 OERLIKON SOLAR AG, TRUEBBACH 发明人 BENAGLI STEFANO;MEIER JOHANNES;KROLL ULRICH
分类号 H01L31/0376;H01L31/18 主分类号 H01L31/0376
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