发明名称 COMPOSITION FOR IMPRINTS, PATTERN AND PATTERNING METHOD
摘要 A composition for imprints comprising a polymerizable monomer, a photopolymerization initiator, and a polymer having a functional group with at least one of a fluorine atom or a silicon atom and having a polymerizable functional group, wherein the polymer has a weight-average molecular weight of at least 2000 and the amount of the polymer is from 0.01 to 20% by mass relative to the polymerizable monomer, is excellent in patternability and mold releasability, capable of forming good patterns and free from a problem of mold contamination.
申请公布号 US2011183127(A1) 申请公布日期 2011.07.28
申请号 US200913122510 申请日期 2009.10.29
申请人 FUJIFILM CORPORATION 发明人 KODAMA KUNIHIKO
分类号 B32B3/00;B29C59/02;C08F2/46;C08L33/16;C08L43/04 主分类号 B32B3/00
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