发明名称 PROCESSING METHOD AND PROCESSING DEVICE FOR SEMICONDUCTOR ELEMENT
摘要 <p>Disclosed is a semiconductor element processing method which both reduces processing time and enables the removal of resin adhesives from a semiconductor element. An IC chip (4) processing method, which removes ACF (6) from an IC chip in order to re-use the IC chip, comprises: a step for immersing an IC chip, which has ACF adhered thereto, in hot concentrated sulphuric acid (11); a step for immersing the IC chip in room temperature concentrated sulphuric acid (21); a step for immersing the IC chip in room temperature dilute sulphuric acid (31); and a step for rinsing the IC chip in water.</p>
申请公布号 WO2011089770(A1) 申请公布日期 2011.07.28
申请号 WO2010JP69033 申请日期 2010.10.27
申请人 SHARP KABUSHIKI KAISHA;MIHOTANI TAKUSHI 发明人 MIHOTANI TAKUSHI
分类号 H01L21/60;H05K3/32 主分类号 H01L21/60
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