发明名称 METHOD FOR ENCAPSULATING AN MEMS COMPONENT
摘要 Method for producing an MST device, and MST device A method for producing an electromechanical transducer is described, wherein an MST component is arranged in a container, and the container is closed with a cover layer, wherein the cover layer is provided with at least one cutout which divides the cover layer into an inner region and an outer region in such a way that both the inner region and the outer region are connected to the top side—facing the cover layer—of the MST component, and the inner region is lifted off while the outer region remains adhered.
申请公布号 US2011180885(A1) 申请公布日期 2011.07.28
申请号 US200913003148 申请日期 2009.07.06
申请人 EPCOS AG 发明人 PAHL WOLFGANG;FEIERTAG GREGOR
分类号 H01L29/84;H01L21/50 主分类号 H01L29/84
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