发明名称 |
METHOD FOR ELECTRON BEAM INDUCED DEPOSITION OF CONDUCTIVE MATERIAL |
摘要 |
The invention relates to a method for electron beam induced deposition of electrically conductive material from a metal carbonyl with the method steps of providing at least one electron beam at a position of a substrate (90), storing at least one metal carbonyl at a first temperature, and heating the at least one metal carbonyl to at least one second temperature prior to the provision at the position at which the at least one electron beam impacts on the substrate (90).
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申请公布号 |
US2011183517(A1) |
申请公布日期 |
2011.07.28 |
申请号 |
US200913058493 |
申请日期 |
2009.08.07 |
申请人 |
CARL ZEISS SMS GMBH |
发明人 |
AUTH NICOLE;SPIES PETRA;BECKER RAINER;HOFMANN THORSTEN;EDINGER KLAUS |
分类号 |
H01L21/768;G21K5/00;H01L21/3205 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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