发明名称 ADHESIVE COMPOSITION AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an adhesive composition that make possible to form a film-like adhesive that satisfies all, with high level including adhesion properties to a semiconductor wafer, wafer buck face grindability, and properties for embedding at flip-chip bonding. SOLUTION: The adhesive composition includes (A) a thermoplastic resin, having a weight average molecular weight of not less than 20,000 and not larger than 100,000; (B) an epoxy resin; (C) a radiation polymerizable compound; (D) a photo initiator; and (E) a microcapsule-type hardening agent. A film-like adhesive that satisfies all with high level, including adhesion property to a semiconductor wafer (A), wafer back surface grindability, and property for embedding at the flip chip is formed by having the composition. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011146731(A) 申请公布日期 2011.07.28
申请号 JP20110046921 申请日期 2011.03.03
申请人 HITACHI CHEM CO LTD 发明人 OKUBO KEISUKE;NAGAI AKIRA
分类号 H01L21/304;C09J4/00;C09J7/02;C09J11/04;C09J11/06;C09J163/00;C09J201/00;H01L21/301 主分类号 H01L21/304
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