PLASMA TREATMENT APPARATUS AND METHOD

摘要

A plasma treated gas permeable material is produced by applying an alternating voltage between spaced electrodes, at least one of which is covered with a dielectric barrier and at least one of which comprises a plurality of discrete electrode segments, to generate plasma microdischarges between the spaced electrodes. A gas permeable material is passed between or adjacent to the spaced electrodes. A gas is moved between the electrode segments into and through the space between the electrodes and through the gas permeable material. The gas flows over plasma generation surfaces of the respective electrode segments and is moved at a rate whereby the gas flow between the spaced electrodes is turbulent and so randomises the plasma microdischarges and disperses plasma products that would otherwise give rise to burning instabilities in the gas permeable material, whereby the randomized plasma microdischarges provide a generally uniform plasma treatment of the gas permeable material. Also disclosed is an apparatus for laying out the process.