发明名称 |
PROCESS FOR FORMING A BACK REFLECTOR FOR PHOTOVOLTAIC DEVICES |
摘要 |
A process for forming a textured back reflector for a photovoltaic device is provided. The process includes providing a moving substrate, positioning the substrate within a deposition chamber, and sputtering a metal or a metal alloy target positioned within the deposition chamber to produce sputtered material. The process further includes introducing a reacting gas mixed with argon into the deposition chamber. The reacting gas and the sputtered metal or metal alloy material form an alloy layer. The alloy layer is formed on the substrate and provides a textured surface on the substrate.
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申请公布号 |
US2011180393(A1) |
申请公布日期 |
2011.07.28 |
申请号 |
US201113010871 |
申请日期 |
2011.01.21 |
申请人 |
CHOWDHURY SHAFIUL A;PODLESNY RICHARD J;CAO XINMIN;RAJU RAMASAMY |
发明人 |
CHOWDHURY SHAFIUL A.;PODLESNY RICHARD J.;CAO XINMIN;RAJU RAMASAMY |
分类号 |
C23C14/35;C23C14/06 |
主分类号 |
C23C14/35 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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