发明名称 |
ELECTRICAL CHARACTERISTIC MEASURING DEVICE AND METHOD |
摘要 |
The electrical characteristic measuring device quickly inspects, over the entire surface of a conductive sheet, electrical characteristics in the thickness direction of a high performance material on a metal thin film. The device is provided with: a grounding guide roll for electrically connecting at low resistance a thin metal film and multiple measuring guide rolls which press the conductive sheet; and a control circuit means which continuously measures electrical characteristics between the measuring and the grounding guide rolls while continuously moving the conductive sheet or the guide rolls, wherein the electric characteristic distribution in the thickness direction on the sheet surface is displayed. |
申请公布号 |
WO2011090060(A1) |
申请公布日期 |
2011.07.28 |
申请号 |
WO2011JP50833 |
申请日期 |
2011.01.19 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION;TANAKA SHIGEYA;KIKUCHI SHUJI;AOKI YASUKO;KANAZAWA MASAKAZU |
发明人 |
TANAKA SHIGEYA;KIKUCHI SHUJI;AOKI YASUKO;KANAZAWA MASAKAZU |
分类号 |
G01N27/04;G01N27/02;G01R27/02;H01M4/04;H01M4/139 |
主分类号 |
G01N27/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|