| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a CVD single crystal diamond material suitable for using in an optical device or element or as the optical device or element. <P>SOLUTION: In the CVD single crystal diamond material exhibiting at least one of the characteristics such as a processability, a mechanical strength, a wear resistance, a chemical inactivity exhibiting a high surface polishing while having a low and uniform birefringence, a uniform and high refringence, a low inductive birefringence or refringence variation as a distortion factor, a low and uniform light absorption, a low and uniform light scattering, a high light (laser) damaging threshold, a high heat conductivity and a high parallelism and flatness, a manufacturing method of the CVD single crystal diamond material includes a step for providing a substrate substantially having no crystal defect, a step for providing a raw material gas, a step for producing a synthesizing atmosphere containing 300 ppb to 5 ppm nitrogen calculated as a molecular nitrogen by dissociating the raw material gas and a step for growing a homoepitaxial diamond on the surface substantially having no crystal defect. <P>COPYRIGHT: (C)2011,JPO&INPIT |
