发明名称 |
SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE TESTING METHOD, AND DATA PROCESSING SYSTEM |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform a confirmation test in which a large difference between AC characteristics does not exist in a plurality of current passes concerned in a plurality of through electrodes between an interface chip and a core chip respectively in a semiconductor device of a type using the interface chip. <P>SOLUTION: The semiconductor device has the interface chip and the core chip, and a measurement-target signal line 130 and a reference signal line 131 which electrically connect the interface chip and the core chip and each of which includes a through electrode. The interface chip sends out a test clock generated with a signal generation circuit 100 to the core chip. The core chip generates a predetermined measurement signal from the test clock with a signal generation circuit 101 and simultaneously sends out the predetermined measurement signal to the measurement-target signal line 130 and the reference signal line 131. Furthermore, the interface chip detects a phase difference between a plurality of the predetermined measurement signals input through the measurement-target signal line 130 and the reference signal line 131 with an operational amplifier 117, and a determination circuit 102 outputs a test result. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011145257(A) |
申请公布日期 |
2011.07.28 |
申请号 |
JP20100008267 |
申请日期 |
2010.01.18 |
申请人 |
ELPIDA MEMORY INC;HITACHI ULSI SYSTEMS CO LTD |
发明人 |
YOKO HIDEYUKI;HARA KENTARO;TAKISHITA TAKAHARU |
分类号 |
G01R31/28;H01L21/822;H01L27/04 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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