发明名称 SOLAR CELL FABRICATION BY NANOIMPRINT LITHOGRAPHY
摘要 Fabricating a solar cell stack includes forming a nanopatterned polymeric layer on a first surface of a silicon wafer and etching the first surface of the silicon wafer to transfer a pattern of the nanopatterned polymeric layer to the first surface of the silicon wafer. A layer of reflective electrode material is formed on a second surface of the silicon wafer. The nanopatterned first surface of the silicon wafer undergoes a buffered oxide etching. After the buffered oxide etching, the nanopatterned first surface of the silicon wafer is treated to decrease a contact angle of water on the nanopatterned first surface. Electron donor material is deposited on the nanopatterned first surface of the silicon wafer to form an electron donor layer, and a transparent electrode material is deposited on the electron donor layer to form a transparent electrode layer on the electron donor layer.
申请公布号 US2011180127(A1) 申请公布日期 2011.07.28
申请号 US201113016006 申请日期 2011.01.28
申请人 MOLECULAR IMPRINTS, INC. 发明人 WAN FEN;YANG SHUQIANG;XU FRANK Y.;LIU WEIJUN;FLETCHER EDWARD BRIAN;SREENIVASAN SIDLGATA V.;MILLER MICHAEL N.;DONALDSON DARREN D.
分类号 H01L31/02;H01L31/0232 主分类号 H01L31/02
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