| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor evading generation of thermal stresses due to changes in ambient temperature, and keeping detection sensitivity and detection accuracy excellent. SOLUTION: An inclination sensor 1 is equipped with: a substrate 10; an insulating layer 20 having an opening 21 and laminated on the substrate 10; a support part 30 which has conductivity, protrudes into the opening 21 from inside the insulating layer 20, and has at least a pair of protrusions 31 opposite to each other in the cross sectional view; a movable body 40 which has conductivity, extends astride over at least the pair of protrusions 31, and is supported in the support part 30 by a suspension part 41 being in touch with the support part 30; and a detection part 50 which has conductivity, is located between the support part 30 and the substrate 10, and protrudes into the opening 21 from inside the insulating layer 20. The movable body 40 has: an arm part 42 extending to the substrate 10 side from the suspension part 41 and having flexibility; and a weight part 43 formed in the arm part 42, and the arm part 42 including the weight part 43 is displaced by external force with respect to the detection part 50. COPYRIGHT: (C)2011,JPO&INPIT |
