LAMINATED SUBSTRATE, METHOD OF MANUFACTURING LAMINATED SUBSTRATE, AND LIGHT-EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide: a laminated substrate that can suppress the manufacturing cost of a substrate having a nonpolar plane or semipolar plane of GaN single crystal on a surface, and actualizes a light-emitting element provided with a nitride-based compound semiconductor layer on a transparent conductive substrate such as a ZnO substrate and a β-Ga2O3substrate; a method of manufacturing the laminated substrate; and a light-emitting element.

SOLUTION: The laminated substrate 10A is made of a material different from a nitride-based compound semiconductor, and includes a conductive support substrate 14 which has a principal surface 14a and is transparent to visible light, and a GaN thin layer 12 which has a surface 12a stuck on the principal surface 14a of the support substrate 14 and formed having a tilt angle of 50 to 110°C to a C-plane of GaN crystal.

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