| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma gas generating device capable of broadly blowing off gas which is turned uniformly to plasma. <P>SOLUTION: The plasma gas generating device is structured by forming a gas flow channel 25 in a housing 12, arraying three or more electrodes 30 in a row in a direction crossing a gas flowing direction in the flow channel to generate discharge only in a discharge space between adjoining electrodes of the three or more electrodes. By structuring the plasma gas generating device in this way, discharge connecting the three or more electrodes arrayed in a row, that is, comparatively thin and long discharge can be uniformly generated, and therefore, by passing gas in a direction crossing an extending direction of the discharge, gas turned uniformly to plasma can be broadly blown off. <P>COPYRIGHT: (C)2011,JPO&INPIT |
