APPARATUS AND METHOD FOR PRODUCING TRICHLOROSILANE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing trichlorosilane, in each of which a polymer separated at a chlorination step is used as a part of a raw material and converted into trichlorosilane efficiently while preventing the plugging of a pipeline. SOLUTION: A decomposition furnace 2 includes: a heating means 11 for heating the inside of the decomposition furnace 2; a central tubular body 3 which is used for dividing the internal space of the decomposition furnace 2 except the inner bottom into inside space and outside space and which is extended along the vertical direction; a raw material supply pipe 15 for supplying the polymer and hydrogen chloride to one of the inside space and the outside space; and a gaseous reaction product discharge pipe 7 for discharging a gaseous reaction product from the other of the inside space and the outside space. The raw material supply pipe 15 includes a polymer supply pipe 5 for supplying the polymer and a hydrogen chloride supply pipe 6 for supplying hydrogen chloride. A confluence part of the polymer supplied from the polymer supply pipe 5 and the hydrogen chloride supplied from the hydrogen chloride supply pipe 6 is formed in the internal space of the decomposition furnace 2 or on the outside of the decomposition furnace 2 in a high temperature zone of at least 200°C. COPYRIGHT: (C)2011,JPO&INPIT