| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To perform laser beam machining with high accuracy by raising the evenness of the energy intensity distribution of a Gaussian type leaser beam. <P>SOLUTION: The laser beam machining device includes: a laser beam oscillator 1 for emitting a laser beam the energy intensity distribution of which has the Gaussian type; a beam expander 3 for expanding the beam diameter of the laser beam; an optical filter unit 7 for evening the energy intensity distribution of the laser beam the beam diameter of which is expanded and a condensing lens 8 for converging the laser beam and emitting it to a part of an object W to be machined. The optical filter unit 7 has at least one optical filter having structure in which a light shading zone for shading the light and a light transmissive light transmitting zone which spread radially from the center part of a substrate toward the outer peripheral part are provided on a flat substrate 71a and the light transmissive zone is made into a shape which is widened gradually toward the outer peripheral part of the substrate. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
