| 摘要 |
In a system and a method for capturing images in a prober, the surface of a test object is illuminated in succession with light of a first, second and third color; an image capturing device records a gray scale image of the surface; and a composite image is produced from the three gray scale images by an image evaluating device. The object is to qualitatively improve the image capturing, in order to raise the positioning accuracy by an improved display, as a result of which, finely structured test objects can be used. This object is achieved in that the lighting device is designed as a unit, controlled by the image evaluating unit, produces at least three colors and includes at least one light emitting diode (LED) as the lighting source.
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