发明名称 Method of manufacturing TFT and array TFT
摘要 A method of manufacturing a thin film transistor includes sequentially forming a gate and at least one insulation layer on a substrate, forming a source electrode and a drain electrode on the at least one insulation layer, and forming a channel layer formed of a semiconductor on a part of the source electrode and the drain electrode, wherein the gate, the source electrode, and the drain electrode are formed by using a hybrid inkjet printing apparatus.
申请公布号 US2011183478(A1) 申请公布日期 2011.07.28
申请号 US20100923051 申请日期 2010.08.31
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHUNG JAE-WOO;LEE SEUNG-HO;HONG YOUNG-KI;KANG SUNG-GYU;KIM JOONG-HYUK
分类号 H01L21/336 主分类号 H01L21/336
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