| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chamber capable of preventing adhesion of particles to an object to be processed, while keeping the cost of the vacuum chamber low, a vacuum processing apparatus equipped with the vacuum chamber, and to provide a method of manufacturing the vacuum chamber. SOLUTION: The vacuum chamber 2 of the large vacuum processing apparatus 1 includes an inner shell member 5, in which a processing space R is formed, and an outer shell member 6, arranged so as to surround the inner shell member 5 wherein the inner shell member 5 is formed from an anti-rust material, and the outer shell material 6 is formed from a low-cost steel material, or the like. COPYRIGHT: (C)2011,JPO&INPIT |
