发明名称 |
Silicon Optical Bench OCT Probe for Medical Imaging |
摘要 |
An optical probe for emitting and/or receiving light within a body comprises an optical fiber that transmits and/or receives an optical signal, a silicon optical bench including a fiber groove running longitudinally that holds an optical fiber termination of the optical fiber and a reflecting surface that optically couples an endface of the optical fiber termination to a lateral side of the optical bench. The fiber groove is fabricated using silicon anisotropic etching techniques. Some examples use a housing around the optical bench that is fabricated using LIGA or other electroforming technology. A method for forming lens structure is also described that comprises forming a refractive lens in a first layer of a composite wafer material, such as SOI (silicon on insulator) wafers and forming an optical port through a backside of the composite wafer material along an optical axis of the refractive lens. the refractive lens is preferably formed using grey-scale lithography and dry etching the first layer.
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申请公布号 |
US2011182550(A1) |
申请公布日期 |
2011.07.28 |
申请号 |
US20100693181 |
申请日期 |
2010.01.25 |
申请人 |
AXSUN TECHNOLOGIES, INC. |
发明人 |
FLANDERS DALE C.;GETZ JAMES W.;ATIA WALID A.;WHITNEY PETER S.;KUZNETSOV MARK E. |
分类号 |
G02B6/26;B29C65/72;B29D11/00 |
主分类号 |
G02B6/26 |
代理机构 |
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