发明名称 RIGID DUAL-SERVO NANO STAGE
摘要 The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.
申请公布号 US2011181151(A1) 申请公布日期 2011.07.28
申请号 US200913054683 申请日期 2009.04.17
申请人 KANG EUN GOO;CHOI YOUNG JAE;LEE SEOK WOO;LEE SANG MOO;NAM KYUNG TAE;JI SANG HOON 发明人 KANG EUN GOO;CHOI YOUNG JAE;LEE SEOK WOO;LEE SANG MOO;NAM KYUNG TAE;JI SANG HOON
分类号 H02N2/04;H02K41/02 主分类号 H02N2/04
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