| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card avoiding deformation of a probe substrate without unnecessarily enhancing the adhesion of a probe unit to a wiring board. SOLUTION: The probe card is equipped with: a probe 110; a probe substrate 120 having a first face 121 in which the probe 110 is provided and a second face 122 which is reverse to the first face 121; a wiring board 200 disposed on the second face 122 side of the probe substrate 120 with a space in-between; a spacer 130 intervening between the second face 122 of the probe substrate 120 and the wiring board 200, and having a through hole 133 penetrating from a first abutting face 131 abutting against the second face 122 of the probe substrate 120 to a second abutting face 132 abutting against the wiring board 200; and an adhesive resin 140a provided in the through hole 133 of the spacer 130 and adhering the second face 122 of the probe substrate 120 to the wiring board 200. COPYRIGHT: (C)2011,JPO&INPIT
|
