OXYGEN RADICAL GENERATION FOR RADICAL-ENHANCED THIN FILM DEPOSITION

摘要

A method of radical-enhanced atomic layer deposition (REALD) involves alternating exposure of a substrate to a first precursor gas (224) and to radicals, such as monatomic oxygen radicals (O°), generated from an oxygen-containing second precursor gas (226), while maintaining spatial or temporal separation of the radicals and the first precursor gas. Simplified reactor designs (210) and process control are possible when the first and second precursor gases are nonreactive under normal processing conditions and can therefore be allowed to mix after the radicals recombine or otherwise abate. In some embodiments, the second precursor gas (226) is an oxygen-containing compound, such as carbon dioxide (CO2) or nitrous oxide (N2O) for example, or a mixture of such oxygen-containing compounds, and does not contain significant amounts of normal oxygen (O2).