发明名称 |
PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A photovoltaic device and a manufacturing method thereof are provided to form a first conductive semiconductor layer and a third conductive semiconductor layer in a first deposition device, thereby shortening manufacturing time of the entire photovoltaic device. CONSTITUTION: A first deposition device(100) comprises a plurality of processing chambers(P1~P6). The first deposition device includes a loading chamber and an unloading chamber in which a substrate(110) is loaded in the deposition device. A transfer fork transfers the substrate to the first processing chamber. The first processing chamber forms a first conductive semiconductor layer(130) on a first electrode(120). |
申请公布号 |
KR20110086444(A) |
申请公布日期 |
2011.07.28 |
申请号 |
KR20100006183 |
申请日期 |
2010.01.22 |
申请人 |
KISCO |
发明人 |
IN, YONG IL;JUNG, YUN SIK;JEON, SANG WON;LIM, BOUNG KWON;JEONG, JUN SOO |
分类号 |
H01L31/04 |
主分类号 |
H01L31/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|