发明名称 PHOTOVOLTAIC DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 PURPOSE: A photovoltaic device and a manufacturing method thereof are provided to form a first conductive semiconductor layer and a third conductive semiconductor layer in a first deposition device, thereby shortening manufacturing time of the entire photovoltaic device. CONSTITUTION: A first deposition device(100) comprises a plurality of processing chambers(P1~P6). The first deposition device includes a loading chamber and an unloading chamber in which a substrate(110) is loaded in the deposition device. A transfer fork transfers the substrate to the first processing chamber. The first processing chamber forms a first conductive semiconductor layer(130) on a first electrode(120).
申请公布号 KR20110086444(A) 申请公布日期 2011.07.28
申请号 KR20100006183 申请日期 2010.01.22
申请人 KISCO 发明人 IN, YONG IL;JUNG, YUN SIK;JEON, SANG WON;LIM, BOUNG KWON;JEONG, JUN SOO
分类号 H01L31/04 主分类号 H01L31/04
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