INLINE TYPE SUBSTRATE COATER APPARATUS

摘要

PURPOSE: A floating type substrate coating apparatus is provided to smoothly implement a pre-discharging process and a cleaning process with respect to a vertically moving slit nozzle by restricting the horizontal movement of the slit nozzle. CONSTITUTION: A plurality of fixed floating modules and movable floating modules is prepared in a floating stage. The floating stage floats a target substrate by spraying or inhaling gas from the surface. A slit nozzle includes a slit-shaped discharging hole in order to supply chemical to the surface of the target substrate. A pre-discharging unit(180) is arranged at the lower side of the floating stage in a chemical coating process and moves to the upper side of the floating stage in a pre-discharging process.