| 摘要 |
The invention relates to a device comprising a MEM resonating element (20), provided for resonating at a predetermined resonance frequency and having at least one temperature dependent characteristic, a heating means (40), comprising a tunable thermal radiation source (40) for heating the MEM resonating element to an offset temperature (T offset ), a sensing means (11, 12), associated with the MEM resonating element and provided for sensing its temperature dependent characteristic, and a control circuit (30), connected to the sensing means (11, 12) for receiving measurement signals indicative of the sensed temperature dependent characteristic and connected to the heating means (40) for supplying a control signal (31) thereto, to maintain the temperature of the MEM resonating element (20) at the offset temperature.
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