发明名称
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a sheetlike substrate, capable of forming a uniform coating film to the surface of the sheetlike substrate over the almost whole range thereof and capable of preventing the drying of the coating solution bonded to the loading end of a die when coating work is interrupted temporarily, and a coating apparatus usable in the manufacturing method. SOLUTION: In the method for manufacturing the sheetlike substrate by discharging the coating solution to the surface of the substrate having a rectangular planar shape from the slit of the die while running the die above the substrate, at first, the die is moved above the coating start part of the surface of the substrate to form an initial bead and, subsequently, the die is transferred to a steady interval to perform steady coating before sucking back is performed at the coating terminal part of the surface of the substrate. The coating apparatus usable in the manufacturing method is also disclosed.
申请公布号 JP4736177(B2) 申请公布日期 2011.07.27
申请号 JP20000349265 申请日期 2000.11.16
申请人 发明人
分类号 B05C5/02;G03F7/16;B05C11/10;B05D1/26;B05D7/00;H01L21/027 主分类号 B05C5/02
代理机构 代理人
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