发明名称
摘要 PROBLEM TO BE SOLVED: To provide a compact position detection sensor having high sensitivity. SOLUTION: This sensor 10 is provided with permanent magnets 12 to 15 and a magnetic sensor 16. An object to be detected 20 is arranged on the upper side in the direction of z-axis of the magnetic sensor 16 on a line passing the center of the permanent magnet 12 and the permanent magnet 15 and extending in the direction of x-axis and vibrates in the direction of y-axis while maintaining a parallel condition with the x-axis. Consequently, a magnetic field in the positive direction of x-axis acts on the magnetic sensor 16 when the object to be detected 20 is displaced in the positive direction of y-axis and a magnetic field in the negative direction of x-axis acts on it when the object to be detected 20 is displaced in the negative direction of y-axis. The magnetic sensor 16 detects these magnetic fields. Since magnetic fields are formed by N-pole and S-pole in this way, it is possible to increase a gradient of the intensity of the magnetic fields and detect a position of the object to be detected with high sensitivity because the magnetic fields acting on the magnetic sensor 16 are greatly changed for the change of the position of the object to be detected.
申请公布号 JP4736210(B2) 申请公布日期 2011.07.27
申请号 JP20010070457 申请日期 2001.03.13
申请人 发明人
分类号 G01B7/00;G01P3/488;G01B7/30;G01D5/16;G01D5/18;G01D5/245;G10H3/18;H01L43/06 主分类号 G01B7/00
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