| 摘要 |
Semiconductor sensor device with a membrane (5) to be operated in a chemically aggressive environment. While the sensor device provides for a first coating (9) under tensile stress, that compensates for e.g. thermally induced compressive stress in the membrane (5) as a result of manufacturing, a second coating (11) is meant to protect the membrane (5) against the environment. For such protection, the second coating (11) is under compressive stress, however, the combined stress of first and second coating (9,11) is of tensile character such that any compressive stress in the membrane (5) still can be compensated. Preferably, both coatings (9,11) comprise silicon nitride. |
