Probe head and method of fabricating the same

摘要

Provided is a probe head and a method of fabricating the same. The probe head includes a sensor unit having: as sensor (140) which records or reads data on or from a predetermined medium (200); first (120) and second (140) shields disposed on both sides of the sensor (140) at a predetermined distance from each other; and first (130) and second (150) intermediate layers respectively interposed between the sensor and the first shield (120), and the sensor (140) and the second shield (140). The method includes: providing a substrate (101); forming an insulating layer (110) on the substrate (101); forming a first shield (120) on the insulating layer (110); forming a first (130) intermediate layer on the first shield (120); forming a sensor (140) on the first intermediate layer (130); forming a second intermediate layer (150) on the sensor (140); forming a second shield (140) on the second intermediate layer (150); and forming a protective layer (190) on the second shield (140). A metal layer (160) connecting the sensor (140) to a power source is formed on the second intermediate layer (150) with a third intermediate layer (170) on it. Accordingly, the resolving ability and sensitivity of the probe head can be simultaneously improved, and the probe head can be easily manufactured.