MANUFACTURING METHOD OF ORGANIC LIGHT-EMITTING FIELD-EFFECT TRANSISTORS

摘要

PURPOSE: A method for manufacturing an organic light emitting transistor is provided to deposit an electron transport layer and a hole transport layer by a specific compound, thereby increasing electric field mobility in the air. CONSTITUTION: A gate electrode(201) is formed in the lower part of a substrate(200). The substrate is inserted into a cluster beam deposition chamber. An evaporated compound is supplied into the cluster beam deposition chamber. A hole transport layer(203) is deposited on an electron transport layer. A source electrode(204) and a drain electrode(205) are formed on the hole transport layer.