发明名称 |
Wafer assembly comprising MEMS wafer with polymerized siloxane attachment surface |
摘要 |
A wafer assembly comprises a wafer having a MEMS layer formed on a frontside and a polymer coating covering the MEMS layer. A holding means is releasably attached to the polymer coating so that the wafer assembly facilitates performance of backside operations on a backside of the wafer. The polymer coating is comprised of a polymerized siloxane.
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申请公布号 |
US7986039(B2) |
申请公布日期 |
2011.07.26 |
申请号 |
US20090563956 |
申请日期 |
2009.09.21 |
申请人 |
SILVERBROOK RESEARCH PTY LTD |
发明人 |
MCAVOY GREGORY JOHN;SILVERBROOK KIA;KERR EMMA ROSE;BAGNAT MISTY;LAWLOR VINCENT PATRICK |
分类号 |
H01L23/10 |
主分类号 |
H01L23/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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