| 发明名称 |
Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same |
| 摘要 |
A method of manufacturing a calibration apparatus for an optical scanner. The method includes reacting a substrate coated with a functional group and a molecule capable of forming an activated excimer to immobilize the molecule on the substrate.
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| 申请公布号 |
US7985453(B2) |
申请公布日期 |
2011.07.26 |
| 申请号 |
US20100709741 |
申请日期 |
2010.02.22 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIM JEO-YOUNG;JUNG SUNG-OUK;NAMGOONG JIN-NA;YOO KYU-TAE;MA JANG-SEOK |
| 分类号 |
B05D5/00;B05D1/36;G01N21/47 |
主分类号 |
B05D5/00 |
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