发明名称 |
ELECTRODE CIRCUIT, FILM FORMATION DEVICE, ELECTRODE UNIT, AND FILM FORMATION METHOD |
摘要 |
<p>An electrode circuit for plasma CVD includes: an alternating-current source; a matching circuit that is connected to the alternating-current source; and parallel plate electrodes that are constituted of a pair of an anode electrode and a cathode electrode, in which the anode electrode and the cathode electrode are arranged such that electrode surfaces of the anode electrode and the cathode electrode face each other. The matching circuit, the parallel plate electrodes, and plasma generated by the parallel plate electrodes form a balanced circuit.</p> |
申请公布号 |
KR20110084512(A) |
申请公布日期 |
2011.07.25 |
申请号 |
KR20117010339 |
申请日期 |
2009.11.12 |
申请人 |
ULVAC, INC. |
发明人 |
MATSUMOTO KOICHI;YODA HIDENORI;OKAYAMA SATOHIRO;MORIOKA YAWARA;YAJIMA TARO |
分类号 |
C23C16/509;H01L21/205;H01L31/04;H05H1/46 |
主分类号 |
C23C16/509 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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