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发明名称
摘要
申请公布号	KR101051807(B1)	申请公布日期	2011.07.25
申请号	KR20030068583	申请日期	2003.10.02
申请人		发明人
分类号	H01L21/24	主分类号	H01L21/24
代理机构		代理人
主权项
地址

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