发明名称 |
PREPARATION PROCESS OF TRISILYLAMINE |
摘要 |
Provided is a preparation process of trisilylamine capable of preparing high-purity trisilylamine more easily at a lower cost. More specifically, provided is a preparation process of trisilylamine, comprising a step of thermally decomposing perhydropolysilazane under an oxygen-free or low oxygen atmosphere.
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申请公布号 |
US2011178322(A1) |
申请公布日期 |
2011.07.21 |
申请号 |
US201113004377 |
申请日期 |
2011.01.11 |
申请人 |
HAMADA YOSHITAKA;HIRAHARA KAZUHIRO |
发明人 |
HAMADA YOSHITAKA;HIRAHARA KAZUHIRO |
分类号 |
C07F7/10 |
主分类号 |
C07F7/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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