| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film, forming a calcination film with roughness generated on the surface suppressed at the time of calcination of a coating film of MOD solution, and capable of forming an oxide superconducting thin film with excellent superconductivity through firing after the calcination. SOLUTION: The manufacturing method of an oxide superconducting thin film, in which the oxide superconducting thin film used for manufacturing a superconducting wire is manufactured with a metal organic compound as a raw material by a coating pyrolytic method, comprises a coating film manufacturing process for manufacturing a coating film by coating solution of a metal organic compound on a substrate, a calcination heat treatment process for carrying out thermal decomposition and removing organic components contained in the metal organic compound of the coating film to manufacture a calcination film, and a firing treatment process for crystallizing the calcination film to manufacture the oxide superconducting thin film. In the calcination treatment process, temperature raising to reach the calcination treatment temperature is carried out under a higher pressure atmosphere than the atmospheric pressure. COPYRIGHT: (C)2011,JPO&INPIT
|
