| 摘要 |
To avoid the rotation action with the polarizer and the analyzer in ellipsometric measurement, complex measurement and repeated process, this invention proposes to polarize the incident light in a fixed azimuthal angle then illuminate the polarized light onto the target surface, analyze the surface polarized characteristics light in a fixed azimuthal angle, and obtain the light intensity and phase information corresponding to the target surface, then based on the relationship between the characteristics information detected by electromagnetic wave and the light intensity information, to obtain the characteristics information of the target surface. In the measurement process, since there may be deviation in polarized azimuthal angle, incident angle and the analyzer azimuthal angle, this invention proposed to use references surfaces to calibrate, after this calibration, based on all the azimuthal angles, the light intensity corresponding to the target surface and the phase information, use the relationship between the characteristics information and the light intensity information, to obtain the characteristics information of the target surface.
|
