| 摘要 |
<p>Provided is a two-direction movement table which moves in an X direction and a Y direction, which are perpendicular to each other on the same plane. A Y-direction movable unit (45) of a Y-direction motor is fixed to a Y-direction table on one end thereof and extended in the Y direction, and has a movable arm (43), which moves in the X and Y directions along with a Y-direction table, and a drive coil (44), which is attached in the movable arm (43) and a part of which is projected in a width direction of the movable arm (43). The drive coil (44) is a lap winding coil in which center portions of a plurality of coreless coils (441), (442), and (443) are arranged in the movable arm (43) along the Y direction, and mutual connecting portions of the coreless coils (441), (442), and (443) are disposed on a part projected from the movable arm (43). With this structure, it is possible to increase a stroke of the two-direction movement table in the Y direction.</p> |
