METHOD FOR CORRECTING MEASUREMENT ERRORS AND ELECTRONIC COMPONENT CHARACTERISTICS MEASURING DEVICE

摘要

A method for correcting measurement errors and an electronic component characteristics measurement device improve correction precision by eliminating correction errors caused by leakage signal components between ports of the measurement jigs. An equation that correlates measurement values in a test measurement jig mounted state with measurement values in a standard measurement jig mounted state is determined from a result of measuring electrical characteristics of correction data obtaining samples having different electrical characteristics from each other in a state in which they are mounted on a standard measurement jig and on a test measurement jig. The equation is an equation that assumes the presence of leakage signals that are directly transmitted between at least two ports of at least one of the standard measurement jig and the test measurement jig. By using the equation determined by measuring the electrical characteristics on an arbitrary electronic component in a state in which it is mounted on the test measurement jig, the electrical characteristics that would be obtained if measured on the electronic component in a state in which it is mounted on the standard measurement jig are calculated.