发明名称 LIQUID CRYSTAL DISPLAY DEVICE AND MANUFACTURING METHOD FOR SAME
摘要 The present invention provides a liquid crystal display device having gate wires and source/drain wires with a multilayer structure made of the same material which can be manufactured at low cost, as well as a manufacturing method for the same. In accordance with the manufacturing method, a wet etching process is carried out on the gate wires and the source/drain wires using an etchant including hydrofluoric acid and an oxidant, and the concentration of hydrofluoric acid in the etchant is different between the etchant for the gate wires and that for the source/drain wires.
申请公布号 US2011176081(A1) 申请公布日期 2011.07.21
申请号 US201113009895 申请日期 2011.01.20
申请人 HITACHI DISPLAYS, LTD. 发明人 SONODA DAISUKE;KANEKO TOSHIKI;TANABE HIDEO
分类号 G02F1/1333;C30B33/10 主分类号 G02F1/1333
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